ICP3 Ion etching system FIRST ETH Zurich

Location: Canton ZH
Procuring office: ETH Zürich - Abt. Procurement & Export Services
Requesting office: ETH Zürich - FIRST-Lab

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Awarded

According to the simap publication. Values that are not given are deliberately missing here.

Awarded to

As published on simap.ch: winner and price (with or without VAT, as stated).

Award of 10.03.20253 bids
- Oxford Instruments GmbH, WiesbadenEUR 482’245.00 without VAT

Awards of this contracting authority

Justification

Die Zuschlagsempfängerin hat die höchste Punktzahl aller eingereichten Angebote erzielt. Insbesondere bei den Lebenszykluskosten wie Unterhaltskosten und Energieverbrauch war ihr Angebot das beste.

AI summary

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Services
Requirements
Conditions
Dates
Award criteria

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What is being procured?

Scope of work

Language of the publication

Delivery of a reactive ion etching system with inductively coupled plasma, consisting of a gas supply system for at least 9 gases, with process pressure up to 100 mtorr and gas flows up to 500 sccm, RF/ICP generators in the kW range with autotuning, spectroscopic monitoring of the plasma, automatic loading lock for fast loading, for sample sizes from 4 inch diameter, with sample temperature control in the range from 10 to 300 °C.

Key facts, codes and options

Type of contract: Supply
Type of supply: Purchase
Procedure: Open procedure
Trades: Not evident from the available publication data.
CPV: CPV 38000000 – Laboratory, optical and precision equipments (excl. glasses)
Options: Not evident from the available publication data.
Variants: Not evident from the available publication data.
Partial offers: Not evident from the available publication data.

TEXFY assessment: Products, installations, quantities, technical specifications and exclusions are not structured fields of the publication. TEXFY does not analyse the free text on them: check the original text and the tender documents.

Market data for this service

From awards published on simap.ch, without rankings and without rating companies.

Comparable awards

Laboratory and measuring equipment, canton of Zurich, last 12 months

55 awards, bids (median): 2.

Awards: Laboratory and measuring equipment

Range of award prices

Laboratory and measuring equipment, canton of Zurich, last 12 months

CHF 163’53110 % of the prices were lower

CHF 580’974Median: half were lower

CHF 2’548’10210 % of the prices were higher

8 out of 10 award prices were between CHF 163’531 and CHF 2’548’102.

From 48 published award prices in CHF from 13.11.2025 to 02.11.2026, with or without VAT, as published. A single contract can differ widely.

Official source

Go to the official tender

simap project number: 4823
Publication number: 4823-02
Covered by international agreements: Yes
TED (EU): Publication on ted.europa.eu (opens in a new tab)

Checked against simap: 10.11.2026, 18:02

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