Tender, extract
Thin Film Cluster Deposition System for Sputtering of Metals and Dielectrics
- Contracting authority
- ETH Zürich - Abt. Procurement & Export Services
- Place
- Canton ZH
- Submission deadline
- No deadline given
- Published
- 19.11.2025
- Procedure
- Open procedure
- Type
- Supply
- Project number
- 7527
- CPV code
- 38000000 Laboratory, optical and precision equipments (excl. glasses)
Description
Thin-film cluster coating system for sputtering metals and dielectrics Cluster system with an airlock and 4 process chambers (PCs) for DC and RF sputtering of dielectrics and metals on semiconductors and other substrates. Please refer to our specification for details.
Links
- This tender in TEXFY: https://www.texfy.ch/en/ausschreibungen/dfa4085a-1257-4299-b926-ed2bde5c923c
- Official publication: https://www.simap.ch/en/project-detail/f5338cbf-a4ce-43eb-9444-75dcb567dfd5