Ein System zur Atomlagenabscheidung (ALD)

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Location: Canton VD
Procuring office: EPFL-Scientific Equipment
Requesting office: EPFL – Nanoelectronic Devices Laboratory (NANOLAB)

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Awarded

According to the simap publication. Values that are not given are deliberately missing here.

Awarded to

As published on simap.ch: winner and price (with or without VAT, as stated).

Award of 13.11.20241 bid
- Veeco GmbH, AschheimPrice not published

Awards of this contracting authority

The price is not published under public procurement law.

Justification

Das gewählte Material entspricht zum jetzigen und voraussehbaren Zeitpunkt am ehesten unseren finanziellen Mitteln und Bedürfnissen (Sicherung der Investitionen) unter Berücksichtigung der schnellen Entwicklung der Anforderungen in der Forschung.

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Requirements
Conditions
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What is being procured?

Scope of work

Language of the publication

Die EPFL beabsichtigt, ein System zur Atomlagenabscheidung für ihr Labor für Nanoelektronische Geräte (NANOLAB) der Technischen Fakultät (STI) zu erwerben. Die Ausrüstung wird speziell für die Abscheidung dünner Schichten aus CMOS-kompatiblen Oxid- und Nitridmaterialien wie VO2, ZrO2, HfO2, HZO, SiO2, TiN, Al2O3 eingesetzt, um energiesparende Geräte für die Informationsverarbeitung und -speicherung sowie energieeffiziente Sensoren herzustellen.

In Bezug auf die Bedürfnisse der EPFL und die spezifischen wissenschaftlichen Ziele ihres NANOLABs wird besonderes Augenmerk auf folgende Prozesse und Materialsysterme gelegt:

Phasenwechselmaterialien basierend auf VO2 (rein und dotiert), einschließlich ultradünner Schichten, geeignet für Kanäle von Feldeffekttransistoren
Ferroelektrische/antiferroelektrische dünne Schichten aus HfO2, ZrO2 und (Hf,Zr)O2, integriert auf TiN, VO2 und Si/SiO2 für nichtflüchtige Speicher und neuromorphe Schaltkreise
Oxide wie SiO2 und Al2O3, einschließlich mehrschichtiger Strukturen, die die oben genannten funktionalen Materialien enthalten

Key facts, codes and options

Type of contract: Supply
Type of supply: Purchase
Procedure: Open procedure
Trades: Not evident from the available publication data.
CPV: CPV 38000000 – Laboratory, optical and precision equipments (excl. glasses)
Options: Not evident from the available publication data.
Variants: Not evident from the available publication data.
Partial offers: Not evident from the available publication data.

TEXFY assessment: Products, installations, quantities, technical specifications and exclusions are not structured fields of the publication. TEXFY does not analyse the free text on them: check the original text and the tender documents.

Market data for this service

From awards published on simap.ch, without rankings and without rating companies.

Comparable awards

Laboratory and measuring equipment, canton of Vaud, last 12 months

39 awards, bids (median): 2.

Awards: Laboratory and measuring equipment

Range of award prices

Laboratory and measuring equipment, canton of Vaud, last 12 months

CHF 316’01510 % of the prices were lower

CHF 534’892Median: half were lower

CHF 2’060’00010 % of the prices were higher

8 out of 10 award prices were between CHF 316’015 and CHF 2’060’000.

From 17 published award prices in CHF from 02.12.2025 to 09.11.2026, with or without VAT, as published. A single contract can differ widely.

Official source

Go to the official tender

simap project number: 4050
Publication number: 4050-02
Covered by international agreements: Yes

Checked against simap: 11.11.2026, 12:03

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More in the guide

Award, reasons and appeal

Contract awards in Vaud: monthly reports

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