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1 atomic layer deposition (ALD) system and 2 atomic layer etching (ALE) systems

Contracting authority
ETH Zürich - Abt. Procurement & Export Services
Place
Canton ZH
Submission deadline
No deadline given
Published
26.11.2024
Type
Supply
Project number
7238
CPV code
38000000 Laboratory, optical and precision equipments (excl. glasses)

Description

Two systems for etching atomic layers (ALE) and one atomic layer deposition system for the Quantum Device Laboratory of the Laboratory for Solid State Physics at ETH Zurich.

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