Dual-Beam Laser Interferometer

The subject of the order is a double-beam laser interferometer (DBLI) for characterising piezoelectric and ferroelectric thin films. The device enables a very precise and contact-free determination of piezoelectric properties including d33 and e31f. The determination of e31f is made possible by a patented process. In addition, the measuring electronics of the device allow a comprehensive characterisation of the ferroelectric and dielectric properties. The device includes an automated sample holder so that wafers up to 200 mm in diameter can be measured fully automatically. The scope of the offer includes the DBLI with measuring electronics as well as the delivery of the device including installation and commissioning.