Maskless aligner for maskless lithography

Location: Canton ZH
Procuring office: ETH Zürich - Abt. Procurement & Export Services
Requesting office: ETH Zürich - Binning and Rohrer Nanotechnology Center (BRNC)

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Awarded directly

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Awarded to

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Award of 21.11.2024Direct award
- Heidelberg Instruments Mikrotechnik GmbH, HeidelbergEUR 538’500.00 without VAT

Awards of this contracting authority

Justification

gem. Art. 21, Abs. 2, Bst. c BöB Der MLA 150 von Heidelberg bietet einzigartige Eigenschaften für Zuverlässigkeit, hohen Durchsatz bei hoher Auflösung, Benutzerfreundlichkeit sowie langfristige Kosteneffizienz. Deshalb ist der MLA 150 das einzige Werkzeug, welches die Reinraumkapazitäten von BRNC erweitern und die geforderten Lithographie-Anforderungen von heute und morgen vollständig erfüllen kann.

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What is being procured?

Scope of work

Language of the publication

Maskless Aligner System for maskless lithography for use in the Binning & Rohrer Nanotechnology Centre (BRNC) of ETH Zurich at IBM Research GmbH.

Key facts, codes and options

Type of contract: Supply
Type of supply: Purchase
Trades: Not evident from the available publication data.
CPV: CPV 38000000 – Laboratory, optical and precision equipments (excl. glasses)
Options: Not evident from the available publication data.
Variants: Not evident from the available publication data.
Partial offers: Not evident from the available publication data.

TEXFY assessment: Products, installations, quantities, technical specifications and exclusions are not structured fields of the publication. TEXFY does not analyse the free text on them: check the original text and the tender documents.

Market data for this service

From awards published on simap.ch, without rankings and without rating companies.

Comparable awards

Laboratory and measuring equipment, canton of Zurich, last 12 months

55 awards, bids (median): 2.

Awards: Laboratory and measuring equipment

Range of award prices

Laboratory and measuring equipment, canton of Zurich, last 12 months

CHF 163’53110 % of the prices were lower

CHF 580’974Median: half were lower

CHF 2’548’10210 % of the prices were higher

8 out of 10 award prices were between CHF 163’531 and CHF 2’548’102.

From 48 published award prices in CHF from 13.11.2025 to 02.11.2026, with or without VAT, as published. A single contract can differ widely.

Official source

Go to the official tender

simap project number: 7359
Publication number: 7359-01
Covered by international agreements: Yes

Checked against simap: 10.11.2026, 18:02

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