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Le nouvel équipement doit permettre la reconstruction 3D de profils de dimensions latérales micrométrique et de dimensions verticales sub micrométriques et micrométriques, avec une haute résolution en z (sub 20 nm à fort grossissement) ainsi que de mesurer de la nano topographie et de la rugosité sub 100nm par interférométrie sur de grands champs.
Source: TED – Tenders Electronic Daily, Publications Office of the EU. Not an official publication; the notice on TED is authoritative.
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